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제품명 : Low Temperqature Asher (PR300)

The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work. It boasts outstanding operability and safety, with an automatic tuning system as a standard component and other features. It has a compact design, with a small-size RF generator and an oscillation section integrated with a portion of the chamber, allowing it to be installed into a 19-inch rack.

Three 64mm diameter chambers are included.
The unit boasts extremely high per area output (Approx. 0.17W/cm2), and can be set for a wide range of output conditions to handle a variety of testing samples.


Reaction Chamber

Operation Flowchart
Piping System Diagram

Specifications
Model
PR300
Method Barred type of direct plasma
Control part 
High frequency output 300W variable (100W × 3 chambers)
Oscillating frequency 13.56 MHz
Output impedance 50 ohm
Tuning method Manual biaxial tuning method
Instrument Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 complet set
Timer 0.1sec. to 999h
Gas inlet 1/4" stainless steel
Power source (50/60Hz) AC 100/230V, single phase, 1 kVA
Reaction part 
Reaction chamber Made of super hard glass, ¢64 × 160mm × 3 rooms
Electrode structure Condenser type, 2-way split
Control system Auto pressure reduction, auto leak valve
Piping material SUS, Teflon, copper
External dimensions
(W × D × Hmm)
438 × 520 × 556
Weight Approx. 38kg
Standard Accessories 
Vacuum grease 1 container Lid for reaction chamber 4 sets
O-ring for reaction chamber 6 pcs. Adapter for ground 1 pc.
Sample dish (large and small) each 4sets    
Optional Accessories
Sample dish (large)Sample dish (small) Sample shelf Stand

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